Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency
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چکیده
منابع مشابه
Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency.
A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. The cost-effective method introduces a backside metal mirror to the grating coupler without need of an extensive wafer-to-wafer bonding. A coupling efficiency of -1.6 dB (around 69%) near the te...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2012
ISSN: 1094-4087
DOI: 10.1364/oe.20.00b238